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Properties of carbon coatings obtained by unipolar and bipolar mixed-mode high-power impulse magnetron sputtering

A.N. Zakharov

Abstract

Properties of carbon coatings obtained by unipolar and bipolar mixed-mode high-power impulse magnetron sputtering --- Source: OpenAlex - Vacuum (Citations: 2) PDF: N/A Original Link: https://doi.org/https://doi.org/10.1016/j.vacuum.2026.115232

Submitted: March 27, 2026Subjects: Open Science; High-power impulse magnetron sputtering

Description / Details

Properties of carbon coatings obtained by unipolar and bipolar mixed-mode high-power impulse magnetron sputtering

Source: OpenAlex - Vacuum (Citations: 2) PDF: N/A Original Link: https://doi.org/https://doi.org/10.1016/j.vacuum.2026.115232

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Submission Info
Date:
Mar 27, 2026
Topic:
High-power impulse magnetron sputtering
Area:
Open Science
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