Research PaperResearchia:202603.27051[High-power impulse magnetron sputtering > Open Science]
Properties of carbon coatings obtained by unipolar and bipolar mixed-mode high-power impulse magnetron sputtering
A.N. Zakharov
Abstract
Properties of carbon coatings obtained by unipolar and bipolar mixed-mode high-power impulse magnetron sputtering
Source: OpenAlex - Vacuum (Citations: 2) PDF: N/A Original Link: https://doi.org/https://doi.org/10.1016/j.vacuum.2026.115232
Submission:3/27/2026
Comments:0 comments
Subjects:Open Science; High-power impulse magnetron sputtering
Cite as:
Researchia:202603.27051https://www.researchia.net/explorer/d50ca293-c221-4c81-a5d7-1dbb4aac84de
Original Source:
Was this helpful?